MR6 Compact Single Stage Regulator

Models MR5 & MR6

Models MR5 and MR6 single-stage miniature gas regulators for non-corrosive (MR5) and mildly corrosive (MR6) gases. **CONFIGURED PRODUCT - Harris provides custom configurations to meet your specifications. Call the Specialty Gas team for more information: 800-733-4043 - Opt. 2**


Models MR5 and MR6 single-stage, compact regulators have a small low internal volume of 2.6 cubic centimeters. The low internal volume provides an ease of purging with minimal gas usage while reducing the potential of contaminates entering into the gas stream. It is ideal for use in portable calibration and analyzer applications. These models have stainless steel diaphragms and 1/4" NPT female inlet and outlet ports. They are designed for use with argon, carbon dioxide, helium, hydrogen, nitrogen, oxygen, compressed air, non-corrosive, mildly corrosive and flammable gases. Models MR5 and MR6 are available with 0-30 psig and 0-100 psig delivery pressures, with various CGA/inlet fittings, accessories and other options for customized regulators. Model MR5 has brass construction and Model MR6 has stainless steel construction.


  • 316 stainless steel diaphragm eliminates contamination from diffusion or out-gassing associated with elastomeric diaphragms
  • One-piece encapsulated seat design with 10 micron sintered internal filter to protect the PTFE Teflon® seat from particulate contamination
  • 1-1/2” brass dual scale gauges
  • Machined brass adjusting knob
  • Brass body and black anodized aluminum bonnet
  • Maximum inlet 3000 psig
  • 1/4" NPT (F) inlet and outlet connections
  • Low internal volume of 2.6 cc allows for rapid purging in analytical instrumentation applications
  • Lightweight and compact design allows for ease of transportation with small cylinders

Typical Applications

  • Non-corrosive gases or Mildly corrosive gases
  • Miniature gas regulators
  • EPA protocol gases
  • Low-level VOC gases
  • High-purity gases


Warning -

Cancer and Reproductive Harm -